> Chemical Process Technology - AAS
> Manufacturing Maintenance Apprenticeship - AAS
> Manufacturing Process Technology - AAS
> Nanofabrication Manufacturing - AAS
MPT 100—Programmable Logic Control I 3-2-4
Introduces students to the fundamental industrial processes and their control. This course will also include design, function and applications of various industrial controllers.
MPT 112—Introduction to Design, Materials and Processes 3-0-3
Focuses on the study of design, materials and the primary processing methods used in manufacturing. A practical course devoted to the many ways in which raw materials are economically converted into useful products. Discussions of primary processing methods - materials additions, removal and change - are grouped together, followed by coverage of applications. Properties of various materials will be covered. Students first build a thorough knowledge of similarities and differences in materials, then processing methods, and that foundation carefully sets the stage for an understanding of how to choose the optimal processes for a specific project.
MPT 121—Manufacturing Maintenance Apprenticeship I 1-40-2
A supervised and evaluated on-the-job training experience designed to provide practical application of the skills and methodology of manufacturing maintenance.
MPT 122—Manufacturing Maintenance Apprenticeship II 1-40-2
A supervised and evaluated on-the-job training experience designed to provide practical application of the skills and methodology of manufacturing maintenance.
MPT 123—Manufacturing Maintenance Apprenticeship III 1-40-2
A supervised and evaluated on-the-job training experience designed to provide practical application of the skills and methodology of manufacturing maintenance.
MPT 170—Industrial Chemistry I 2-2-3
An introduction to the principles of statistical process control, industrial hygiene, safety and preventative maintenance in the chemical industry. The study of energy systems and their utilization in chemical processing is also considered.
MPT 171—Industrial Chemistry II 2-2-3
Introduction to the procedures, equipment and techniques used in industrial labs. Safety is stressed throughout the course. Additional applications of maintenance and the troubleshooting of equipment is demonstrated.
MPT 199—Manufacturing Process 1-12-3 Technology Internship
Students will obtain experience in the manufacturing process technology field through a combination of occupational instruction and on-the-job training. This course integrates classroom occupational study with a planned supervised practical work experience. Prerequisite: Permission of instructor
MPT 200—Programmable Logic Control II 3-2-4
Introduces students to the basic concept of automated manufacturing systems including drive mechanisms and sensing devices. This course will give students a background in today’s flexible systems. Prerequisite: MPT 100
MPT 201—Programmable Logic Control III 2-2-3
Introduces students to automated-manufacturing system troubleshooting. This course is designed to give students practical experience in problem-solving and applications. Prerequisite: MPT 200
MPT 209—Instrumentation & Process Control 3-2-4
Investigates the electronic techniques that are used for measurement and control in process control systems. Closed-loop systems including transducers, signal conditioning and analog and digital controllers will be considered. The overall objective is to prepare graduates to install, adjust and maintain electronic and related parts of commercial and industrial systems.
MPT 211—Material, Safety and Equipment Overview for Nanofabrication 2-2-3
The course will provide an overview of basic nanofabrication processing equipment and materials handling procedures. The focus is on procedural, safety, environment and health issues in equipment operation and materials handling. Topics to be covered will include: cleanroom operation, safety and health issues; vacuum pump systems, operation, environmental, safety and health issues (covering direct drive mechanical, roots blowers, turbonmolecular, and dry mechanical systems); furnace operation, safety, environmental and health issues (covering horizontal, vertical, rapid thermal annealing tools); chemical vapor deposition system operation, safety, environmental and health issues (covering gas delivery, corrosive and flammable gas storage and plumbing, regulators, and mass flow controls); and vacuum deposition/etching system operation, safety environment and health issues covering microwave and RF power supplies and tuners, heating and cooling units, vacuum gauges, valves and process controllers). Specific materials handling issues will include DI water, solvents, cleansers, ion implantation sources, diffusion sources, photoresists, developers, metals, dielectrics, and toxic, flammable, corrosive and high purity gases as well as packaging materials.
MPT 212—Basic Nanofabrication Processes 2-2-3
This course will provide an overview of basic processing steps in nanofabrication. The majority of the course details a step-by-step description of the equipment and processes needed to fabricate devices and structures. Processing flow will be examined for structures such as microelectromechanical (MEM) devices, biomedical “lab-on-a-chip” structures, display devices, and microelectronic devices including diode, transistor and full CMOS structures. Students will learn the similarities and differences in both equipment and process flow for each configuration by undertaking hands-on processing.
MPT 213—Thin Films in Nanofabrication 2-2-3
This course will cover thin film deposition and etching practices in nanofabrication. The deposition techniques to be included in the first part of the course will include atmospheric, low pressure, and plasma enhanced chemical vapor deposition and sputtering; thermal evaporation; and beam evaporation physical vapor deposition. Materials to be considered will include dielectrics (nitride, oxide), polysilicon (doped and undoped), metals (aluminum, tungsten, copper), adhesion promoters and diffusion barriers. The second part of the course will focus on etching processes and will emphasize reactive ion etching (single wafer, batch), high-ion-density reactors, ion beam etching and wet chemical etching. Students will receive hands-on experience in depositing and etching dielectric, semiconductor and metal materials using state-of-the-art tools and practicing many of the steps critical to nanofabrication of semiconductor devices including microelectronic, MEMs devices, display structures and structures used in the biotechnology fields.
MPT 214—Lithography for Nanofabrication 2-2-3
This specific course will cover all aspects of lithography from design and mask fabrication to pattern transfer and inspection. The course is divided into three major sections. The first section describes the lithographic process from substrate preparation to exposure. Most of the emphasis will be on understanding the nature and behavior of photoresist materials. The second section examines the process from development through inspection (both before and after pattern transfer). This section will introduce optical masks, aligners, steppers and scanners. In addition, critical dimension (CD) control and profile control of photoresists will be investigated. The last section will discuss advanced optical lithographic techniques such as phase shifting masks and illumination schemes as well as 3-beam, X-ray, EUV and ion beam lithography.
MPT 215—Materials Modification in Nanofabrication 2-2-3
This course will cover in detail the processing steps used in modifying material properties in nanofabrication. Included will be growth and annealing processes utilizing horizontal and vertical furnaces as well as rapid thermal annealing. The impact of thermal processing and thermal processing in defects, gettering, impurities and overall electrical mechanical, optical, electrical and chemical properties will be studied. The student will grow and measure gate and field oxides, implant and activate source and drain regions, and evaluate thermal budget requirements using state-of-the-art tools. Included also will be other modification technologies such as ion implantation, diffusion and surface preparation and treatment. Substrate preparation processing such as slicing, etching, polishing and epitaxial growth will be covered.
MPT 216—Characterization, Packaging and Testing of Nanofabricated Structures 2-2-3
This course will examine a variety of techniques and measurements essential for controlling device fabrication and final packaging. Monitoring techniques such as residual gas analysis (rga), optical emission spectroscopy (OES) and end point detection will be discussed. Characterization techniques such as SEM, XPS/Auger, surface profilometry, advanced optical microscopy, optical thin film measurements, ellipsometry, and resistivity/conductivity to yield analysis and process control will also be stressed. These will include breakdown measurements, junction testing, and C-V and I-V tests and simple transistor characterization. In addition, we will examine mechanical as well as electrical characteristics of some simple MEMs devices and chemical and biological responses of nanofabricated biomedical structures. The student will also learn about the manufacturing issues involved in subjects such as interconnects, isolation and final device assembly. Aluminum, refractory metals and copper deposition techniques and characterization will be discussed in detail along with topics such as diffusion barriers, contact resistance, electromigration, corrosion, stress effects and adhesion. The importance of planarization techniques such as deposition/etchback and chemical/mechanical polishing will be emphasized. Lastly, packaging procedures such as die separation, inspection bonding, sealing and final test for both conventional ICs and novel MEM and biomedical devices will be examined.
MPT 221—Manufacturing Maintenance Apprenticeship IV 1-40-2
A supervised and evaluated on-the-job training experience designed to provide practical application of the skills and methodology of manufacturing maintenance.
MPT 222—Manufacturing Maintenance Apprenticeship V 1-40-2
A supervised and evaluated on-the-job training experience designed to provide practical application of the skills and methodology of manufacturing maintenance.
MPT 223—Manufacturing Maintenance Apprenticeship VI 1-40-2
A supervised and evaluated on-the-job training experience designed to provide practical application of the skills and methodology of manufacturing maintenance.
MPT 240—Introduction to Automated Manufacturing 2-2-3
Provides students with an overview of the hardware and functions of industrial robotics, and hands-on training with a state-of-the-art industrial robot. Lecture topics include robot configuration, tooling, application information, safety considerations and future trends. Laboratory work allows students to create, edit and execute programs on a 5-axis industrial robot.
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